EL ENG 143 Midterm: ee143-fa2009-mt1-Javey-exam
Document Summary
There are a total of 11 pages on this exam, including the cover page. Circle either (t)rue or (f)alse (2 pts each: mixing acid and solvents should be done carefully in the sink area, piranha removes both organic and metallic contaminants from the wafers. T / f: partially coherent light improves the resolution of smaller feature sizes for projection lithography as compared to a fully coherent light, n-type si has zero hole concentration. T / f: when a positive photoresist is exposed to light, cross-linking of the polymeric chains is resulted, band-gap of semiconductors increase with temperature, we can use pyrex glassware to perform hf etching of substrates. T / f: if your skin is brought in contact to hf, then rinse your exposed body part under water for 15 min. T / f: you wear a gown in the clean room mainly to protect yourself from hazardous and corrosive chemicals.
